Research Papers: Imaging

Feasibility study on bonding quality inspection of microfluidic devices by optical coherence tomography

[+] Author Affiliations
Shiguang Li

Singapore-MIT Alliance, N3.2-01-36, 65 Nanyang Drive, Singapore 637460

Nanyang Technological University, School of Electrical and Electronic Engineering, Singapore 639798

Singapore Institute of Manufacturing Technology, 71 Nanyang Drive, Singapore 638075

Zhiguang Xu

Singapore-MIT Alliance, N3.2-01-36, 65 Nanyang Drive, Singapore 637460

Nanyang Technological University, School of Electrical and Electronic Engineering, Singapore 639798

Singapore Institute of Manufacturing Technology, 71 Nanyang Drive, Singapore 638075

Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge, Massachusetts 02139

Soon Fatt Yoon

Singapore-MIT Alliance, N3.2-01-36, 65 Nanyang Drive, Singapore 637460

Nanyang Technological University, School of Electrical and Electronic Engineering, Singapore 639798

Zhong Ping Fang

Singapore Institute of Manufacturing Technology, 71 Nanyang Drive, Singapore 638075

J. Biomed. Opt. 16(6), 066011 (June 02, 2011). doi:10.1117/1.3590747
History: Received September 27, 2010; Revised April 21, 2011; Accepted April 22, 2011; Published June 02, 2011; Online June 02, 2011
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This paper reports the feasibility of optical coherence tomography (OCT) technology for inspection of bonding quality of microfluidic devices in manufacturing environments. A compact optical-fiber–based OCT is developed and its measurement performance is characterized. A series of microfluidic devices respectively bonded by adhesive tape, thermal method, and oxygen plasma, are inspected. The defects of geometry deformation and sealing completeness are emphasized during measurements. Based on the inspection results, some discoveries related to the production of microfluidic devices are discussed.

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© 2011 Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation

Shiguang Li ; Zhiguang Xu ; Soon Fatt Yoon and Zhong Ping Fang
"Feasibility study on bonding quality inspection of microfluidic devices by optical coherence tomography", J. Biomed. Opt. 16(6), 066011 (June 02, 2011). ; http://dx.doi.org/10.1117/1.3590747


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