Paper
8 March 2017 Modeling and optimizing of a water-cooled unimorph deformable mirror
Zhengxiong Zhu, Lei Tian, Jialian Zhang, Jianqiang Ma
Author Affiliations +
Proceedings Volume 10255, Selected Papers of the Chinese Society for Optical Engineering Conferences held October and November 2016; 102555G (2017) https://doi.org/10.1117/12.2267778
Event: Selected Papers of the Chinese Society for Optical Engineering Conferences held October and November 2016, 2016, Jinhua, Suzhou, Chengdu, Xi'an, Wuxi, China
Abstract
A water-cooled unimorph deformable mirror (DM) is proposed for high-power laser applications. The piezoelectric actuators are distributed around the correction area on the front side of the DM. The cooling water flows through the back side of the DM. This design realizes the physical separation between the electrical connections and cooling medium. It is important to optimize the structure of the designed water-cooled DM. First, a model of the DM was established using finite element method (FEM) to predict the deformation behavior of single actuator and the reconstruction of the DM. Then the comparison analysis of different apertures, radii and thicknesses were performed for structure optimization. The simulation results indicate that: The reconstructing precision of the DM is better than 98% for the typical low-order aberrations with relative large amplitude under the voltage range from -50V to +50V, which is suitable for high-power laser beam shaping.
© (2017) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Zhengxiong Zhu, Lei Tian, Jialian Zhang, and Jianqiang Ma "Modeling and optimizing of a water-cooled unimorph deformable mirror", Proc. SPIE 10255, Selected Papers of the Chinese Society for Optical Engineering Conferences held October and November 2016, 102555G (8 March 2017); https://doi.org/10.1117/12.2267778
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KEYWORDS
Actuators

Monochromatic aberrations

Finite element methods

High power lasers

Deformable mirrors

Ferroelectric materials

Silicon

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