Experimental light scattering by small particles: first results with a novel Mueller matrix scatterometer

Antti Penttilä; Göran Maconi; Ivan Kassamakov; Maria Gritsevich; Petteri Helander; Tuomas Puranen; Edward Hæggström; Karri Muinonen

doi:10.1117/12.2267863

26 June 2017 Experimental light scattering by small particles: first results with a novel Mueller matrix scatterometer

Antti Penttilä, Göran Maconi, Ivan Kassamakov, Maria Gritsevich, Petteri Helander, Tuomas Puranen, Edward Hæggström, Karri Muinonen

Author Affiliations +

Proceedings Volume 10330, Modeling Aspects in Optical Metrology VI; 103300A (2017) https://doi.org/10.1117/12.2267863
Event: SPIE Optical Metrology, 2017, Munich, Germany

Abstract

We describe a setup for measuring the full angular Mueller matrix profile of a single mm- to μm-sized sample, and verify the experimental results against a theoretical model. The scatterometer has a fixed or levitating sample, illuminated with a laser beam whose full polarization state is controlled. The scattered light is detected with a combination of wave retarder, linear polarizer, and photomultiplier tube that is attached to a rotational stage. The first results are reported.

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Antti Penttilä, Göran Maconi, Ivan Kassamakov, Maria Gritsevich, Petteri Helander, Tuomas Puranen, Edward Hæggström, and Karri Muinonen "Experimental light scattering by small particles: first results with a novel Mueller matrix scatterometer", Proc. SPIE 10330, Modeling Aspects in Optical Metrology VI, 103300A (26 June 2017); https://doi.org/10.1117/12.2267863

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