Coupled multiphysics circuital modelling of micro-opto-mechanical pressure sensor systems

Benedetto Troia; Chih-Hsien Huang; Shengping Mao; Hang Gao; Bruno Figeys; Roelof Jansen; Veronique Rochus; Xavier Rottenberg

doi:10.1117/12.2290361

22 February 2018 Coupled multiphysics circuital modelling of micro-opto-mechanical pressure sensor systems

Benedetto Troia, Chih-Hsien Huang, Shengping Mao, Hang Gao, Bruno Figeys, Roelof Jansen, Veronique Rochus, Xavier Rottenberg

Author Affiliations +

Proceedings Volume 10545, MOEMS and Miniaturized Systems XVII; 1054518 (2018) https://doi.org/10.1117/12.2290361
Event: SPIE OPTO, 2018, San Francisco, California, United States

Abstract

Micro-opto-mechanical pressure sensors (MOMPS) based on integrated optical Mach-Zehnder interferometers (MZI) have been fabricated at IMEC, exhibiting much improved sensitivity and noise performance compared to their piezoelectric and capacitive counterparts. However, the design of next generation MOMPS systems on chip still remains uncertain due to the intrinsic multiphysics nature covering mechanical, optical and electrical phenomena. For this reason, we present a sophisticated, flexible and customizable algorithmic tool for the multiphysics simulation and design of highperformance MOMPS systems on chip, including mechanical and optical effects as well as the electronic circuitry for the readout. Furthermore, static and dynamic operating regimes are analyzed, also comparing analytical solutions with experimental results and demonstrating a good agreement. Finally, system noise contributions generated by the optoelectronic components and readout electronics are calculated and a static sensitivity of 8 mV/Pa is measured in the fabricated sensors.

Citation Download Citation

Benedetto Troia, Chih-Hsien Huang, Shengping Mao, Hang Gao, Bruno Figeys, Roelof Jansen, Veronique Rochus, and Xavier Rottenberg "Coupled multiphysics circuital modelling of micro-opto-mechanical pressure sensor systems", Proc. SPIE 10545, MOEMS and Miniaturized Systems XVII, 1054518 (22 February 2018); https://doi.org/10.1117/12.2290361

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available