Real-time and label-free chemical sensing using flexible mid-infrared photonic circuits (Conference Presentation)

Pao T. Lin

doi:10.1117/12.2305479

15 May 2018 Real-time and label-free chemical sensing using flexible mid-infrared photonic circuits (Conference Presentation)

Pao T. Lin

Author Affiliations +

Proceedings Volume 10662, Smart Biomedical and Physiological Sensor Technology XV; 106620N (2018) https://doi.org/10.1117/12.2305479
Event: SPIE Commercial + Scientific Sensing and Imaging, 2018, Orlando, FL, United States

Abstract

Chip-scale chemical sensors were demonstrated using flexible mid-Infrared (mid-IR) photonic circuits consisting of aluminum nitride (AlN) waveguides on ultrathin substrates. The AlN waveguide structure was fabricated by the complementary metal–oxide–semiconductor (CMOS) process. The waveguide sensor is highly bendable because the thin device thickness, which effectively reduces the surface strain. Through spectrum scanning over the characteristic -OH absorption, the waveguide sensor can differentiate methanol, ethanol, and water, and accurately determine the chemical compositions of the water/ethanol mixtures. Real-time chemical monitoring was accomplished by measuring the waveguide mode attenuation at λ = 2.65 μm. Due to the high mechanical flexibility and mid-IR transparency, the AlN chemical sensor enables integrated photonics for biomedical wearables and remote environmental monitoring.

Conference Presentation

Citation Download Citation

Pao T. Lin "Real-time and label-free chemical sensing using flexible mid-infrared photonic circuits (Conference Presentation)", Proc. SPIE 10662, Smart Biomedical and Physiological Sensor Technology XV, 106620N (15 May 2018); https://doi.org/10.1117/12.2305479

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