Visualization of laser-induced periodic Nano structures beyond optical-resolution by noninvasive optical method

Jose-Alberto Aguilar Mora; Alain Abou Khalil; David Pallarés Aldeiturriaga; Sedao Xxx; Cyril Mauclair; Pierre Bon

doi:10.1117/12.2648932

17 March 2023 Visualization of laser-induced periodic Nano structures beyond optical-resolution by noninvasive optical method

Jose-Alberto Aguilar Mora, Alain Abou Khalil, David Pallarés Aldeiturriaga, Sedao Xxx, Cyril Mauclair, Pierre Bon

Author Affiliations +

Proceedings Volume 12409, Laser-based Micro- and Nanoprocessing XVII; 124090T (2023) https://doi.org/10.1117/12.2648932
Event: SPIE LASE, 2023, San Francisco, California, United States

Abstract

Laser processing of material surfaces has been very known for the last five decades. Femtosecond LIPSS, are created generally on the surface, they could be classified into two groups depending on the periodicity of the structures: LSFL showing a periodicity lower than the incident wavelength (λ_l), and HSFL with a periodicity well below λ_l that could sit below the optical diffraction limit. In this paper, we show an unprecedented resolution of a noninvasive label-free optical method to observe such structures, that does not require a priori knowledge of the surface. We demonstrate that using a modified reflectance confocal microscope reflection (CMR), the characterization of HSFL(̴Λ_HSFL∽120 nm @ λ_l=257 nm) is possible and efficient. These results, pave the way toward a new, better, and more resolved optical technique to observe nanostructures below the diffraction limit.

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Citation Download Citation

Jose-Alberto Aguilar Mora, Alain Abou Khalil, David Pallarés Aldeiturriaga, Sedao Xxx, Cyril Mauclair, and Pierre Bon "Visualization of laser-induced periodic Nano structures beyond optical-resolution by noninvasive optical method", Proc. SPIE 12409, Laser-based Micro- and Nanoprocessing XVII, 124090T (17 March 2023); https://doi.org/10.1117/12.2648932

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