Reflective deep-ultraviolet Fourier ptychographic microscopy for nanoscale imaging

Kwan Seob Park; Yoon Sung Bae; Sang-Soo Choi; Martin Y. Sohn

doi:10.1117/12.2666132

30 April 2023 Reflective deep-ultraviolet Fourier ptychographic microscopy for nanoscale imaging

Kwan Seob Park, Yoon Sung Bae, Sang-Soo Choi, Martin Y. Sohn

Proceedings Volume 12496, Metrology, Inspection, and Process Control XXXVII; 124963L (2023) https://doi.org/10.1117/12.2666132
Event: SPIE Advanced Lithography + Patterning, 2023, San Jose, California, United States

Conference Poster

Abstract

We present a reflective Fourier ptychographic microscopy (FPM) with a deep ultraviolet (DUV) laser and a high numerical aperture objective for sub-100nm imaging of an opaque target used in semiconductor device manufacturing. An aperture scanning illumination system designed for a laser with high energy fluence is implemented for angle-varied illumination. Performance of the DUV FPM is evaluated and compared to conventional DUV microscopy by imaging a series of molybdenum silicide (MoSi) multiline with a minimum linewidth of 80 nm, showing that contrast enhancement ratio increases as the linewidth of the target decreases.

Citation Download Citation

Kwan Seob Park, Yoon Sung Bae, Sang-Soo Choi, and Martin Y. Sohn "Reflective deep-ultraviolet Fourier ptychographic microscopy for nanoscale imaging", Proc. SPIE 12496, Metrology, Inspection, and Process Control XXXVII, 124963L (30 April 2023); https://doi.org/10.1117/12.2666132

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available