Three-dimensional measurement of defects on optical surface by transient interference technique

Lanqing Li; Weixiang Yang; Jiaxing Chen; Kaizao Ni; Shijie Liu; Jianda Shao

doi:10.1117/12.2666038

4 April 2023 Three-dimensional measurement of defects on optical surface by transient interference technique

Lanqing Li, Weixiang Yang, Jiaxing Chen, Kaizao Ni, Shijie Liu, Jianda Shao

Proceedings Volume 12617, Ninth Symposium on Novel Photoelectronic Detection Technology and Applications; 126173J (2023) https://doi.org/10.1117/12.2666038
Event: 9th Symposium on Novel Photoelectronic Detection Technology and Applications (NDTA 2022), 2022, Hefei, China

Abstract

Surface defects on optical components may strongly modulate the incident light field. The local intensity increases significantly, and even exceeds the Laser Induced Damage Threshold (LIDT) of optics. The operation of high-power laser systems is threatened seriously. A three-dimensional topography measurement technique for defects on large-aperture element surface based on the principle of transient interferometry is proposed. Based on the location measurement results of surface defect by the fast-scanning method, the transient interferometry system can focus on the measurement of regions including surface defects. The sub-aperture stitching algorithm is utilized to acquire the complete morphology of surface defects. The algorithm of defect depth extraction from 3D topography is proposed. Moreover, surface defect’s depth and width are statistically analyzed preliminarily, which lays a foundation for the manufacturing process improvement and evaluation for laser system applications. Surface defect and contaminant are distinguished effectively by the three-dimensional topography measurement system for surface defect of large-aperture optics. The established technique can effectively compensate the shortcomings of existing methods, such as microscopic scattering dark-field imaging.

Citation Download Citation

Lanqing Li, Weixiang Yang, Jiaxing Chen, Kaizao Ni, Shijie Liu, and Jianda Shao "Three-dimensional measurement of defects on optical surface by transient interference technique", Proc. SPIE 12617, Ninth Symposium on Novel Photoelectronic Detection Technology and Applications, 126173J (4 April 2023); https://doi.org/10.1117/12.2666038

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KEYWORDS

3D metrology

3D image processing

Interferometry

Scattering

Imaging systems

Optical components

Optics

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