Development and optimization of CMOS-compatible AlN-based photonic devices for 1.55 µm applications: fabrication, characterization, and potential for integrated optics

R. Amrar; G. Beaudin; G. Droulers; S. Loquai; P. G. Charette

doi:10.1117/12.2692237

8 March 2024 Development and optimization of CMOS-compatible AlN-based photonic devices for 1.55 µm applications: fabrication, characterization, and potential for integrated optics

R. Amrar, G. Beaudin, G. Droulers, S. Loquai, P. G. Charette

Author Affiliations +

Proceedings Volume 12890, Smart Photonic and Optoelectronic Integrated Circuits 2024; 1289007 (2024) https://doi.org/10.1117/12.2692237
Event: SPIE OPTO, 2024, San Francisco, California, United States

Abstract

This study presents the development and optimization of AlN-based optical waveguides and photonic devices for 1.55 μm applications, utilizing a CMOS-compatible sputtered thin film technology. The fabrication employs a two-step photoresist technique to fabricate AlN core waveguides with low propagation losses and other optical devices, such as a 1×2 multimode interference (MMI) coupler, Mach-Zehnder interferometers and ring resonators. The results of this study highlight the potential for efficient and cost-effective fabrication of AlN-based integrated optical circuits and pave the way for further research and development in the field of integrated optics.

Conference Presentation

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

R. Amrar, G. Beaudin, G. Droulers, S. Loquai, and P. G. Charette "Development and optimization of CMOS-compatible AlN-based photonic devices for 1.55 µm applications: fabrication, characterization, and potential for integrated optics", Proc. SPIE 12890, Smart Photonic and Optoelectronic Integrated Circuits 2024, 1289007 (8 March 2024); https://doi.org/10.1117/12.2692237

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available