Theoretical and practical aspects of real-time Fourier imaging

Dennis S. Grimard; Fred Lewis Terry Jr.; Michael E. Elta

doi:10.1117/12.48946

1 March 1991 Theoretical and practical aspects of real-time Fourier imaging

Dennis S. Grimard, Fred Lewis Terry Jr., Michael E. Elta

Proceedings Volume 1392, Advanced Techniques for Integrated Circuit Processing; (1991) https://doi.org/10.1117/12.48946
Event: Processing Integration, 1990, Santa Clara, CA, United States

Abstract

This paper reports the theoretical and experimental sensitivity of Fourier imaging (Fl) and the Fourier imaging system (FIS)'' respectively. The theory based on scalar diffraction which specifies these sensitivities is presented and discussed. Specifically the theoretical sensitivity of the Fl technique at a wavelength of 633 nm is determined to be 0. 003 nm while the experimental sensitivity of the FIS is approximately 15 nm. Both of these figures utilize a one-dimensional 1-pm rectangular diffraction structure for their calculation.

Citation Download Citation

Dennis S. Grimard, Fred Lewis Terry Jr., and Michael E. Elta "Theoretical and practical aspects of real-time Fourier imaging", Proc. SPIE 1392, Advanced Techniques for Integrated Circuit Processing, (1 March 1991); https://doi.org/10.1117/12.48946

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