Improved signal processing method for heterodyne interferometer

Hongzhi Zhao; Yang Zhao

doi:10.1117/12.276329

17 July 1996 Improved signal processing method for heterodyne interferometer

Hongzhi Zhao, Yang Zhao

Proceedings Volume 2860, Laser Interferometry VIII: Techniques and Analysis; (1996) https://doi.org/10.1117/12.276329
Event: SPIE's 1996 International Symposium on Optical Science, Engineering, and Instrumentation, 1996, Denver, CO, United States

Abstract

On the basis of the combination of phase measurement and integer periodic phase measurement, a signal processing scheme, which is used for optical heterodyne interferometer with large range, is described. It not only maintains the high measuring resolution , but also enlarges the measuring range, with solving the problem of large range and measurement of dynamic displacement.

Citation Download Citation

Hongzhi Zhao and Yang Zhao "Improved signal processing method for heterodyne interferometer", Proc. SPIE 2860, Laser Interferometry VIII: Techniques and Analysis, (17 July 1996); https://doi.org/10.1117/12.276329

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