High-sensitivity photoelectric pressure sensor based on a monolithic dual photodiode

Weimin Zheng; Tianning Cao; Junxia Qian

doi:10.1117/12.252106

25 September 1996 High-sensitivity photoelectric pressure sensor based on a monolithic dual photodiode

Weimin Zheng, Tianning Cao, Junxia Qian

Proceedings Volume 2894, Detectors, Focal Plane Arrays, and Applications; (1996) https://doi.org/10.1117/12.252106
Event: Photonics China '96, 1996, Beijing, China

Abstract

This paper presents a novel and simple photoelectric pressure sensor. The pressure sensing element is a linear capsule with a miniature opaque windowshade on its center. The photo detector is a monolithic dual photodiode. The two photodiodes of this detector are used as reference photodiode and the detection photodiode, respectively. Through this differential structure, the displacement of the windowshade caused by the fluid pressure is picked up, while the influence of the environmental perturbation can be eliminated. The nonlinearity error can be corrected by a single chip computer. This sensor has excellent stability, linearity and high sensitivity as well as good manufacturability. Experiment results show that the minimum detectable pressure is less than 20 Pa with the measurement range of 0 approximately 6 HZ, the nonlinearity error without correction is less than +/- 0.3% within the range of 6000 Pa.

Citation Download Citation

Weimin Zheng, Tianning Cao, and Junxia Qian "High-sensitivity photoelectric pressure sensor based on a monolithic dual photodiode", Proc. SPIE 2894, Detectors, Focal Plane Arrays, and Applications, (25 September 1996); https://doi.org/10.1117/12.252106

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available