Paper
22 November 1982 Pattern Recognition For Automatic Visual Inspection
K. S. Fu
Author Affiliations +
Proceedings Volume 0336, Robot Vision; (1982) https://doi.org/10.1117/12.933606
Event: 1982 Technical Symposium East, 1982, Arlington, United States
Abstract
Three major approaches to pattern recognition, (1) template matching, (2) decision-theoretic approach, and (3) structural and syntactic approach, are briefly introduced. The application of these approaches to automatic visual inspection of manufactured products are then reviewed. A more general method for automatic visual inspection of IC chips is then proposed. Several practical examples are included for illustration.
© (1982) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
K. S. Fu "Pattern Recognition For Automatic Visual Inspection", Proc. SPIE 0336, Robot Vision, (22 November 1982); https://doi.org/10.1117/12.933606
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CITATIONS
Cited by 4 scholarly publications.
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KEYWORDS
Inspection

Photomasks

Optical inspection

Pattern recognition

Defect detection

Image segmentation

Image classification

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