High-speed 3D shape measurement using a nonscanning multiple-beam confocal imaging system

Mitsuhiro Ishihara; Hiromi Sasaki

doi:10.1117/12.312975

30 June 1998 High-speed 3D shape measurement using a nonscanning multiple-beam confocal imaging system

Mitsuhiro Ishihara, Hiromi Sasaki

Proceedings Volume 3478, Laser Interferometry IX: Techniques and Analysis; (1998) https://doi.org/10.1117/12.312975
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1998, San Diego, CA, United States

Abstract

This paper describes a high-speed 3D shape measurement system for in-line semiconductor package inspections. The system consists of three parts. One is an optics and sensor for confocal imaging, which we call a non-scanning multiple- beam confocal microscope. The microscope can get a confocal image within very short time because XY-scanning, which is required in conventional confocal microscopes, is not needed. Another is the algorithm that performs reconstructing the object surfaces accurately from a few confocal images. The last is a mechanism that performs shifting the focused plane of the microscope very quickly. This experimental system can measure objects having a space of 9.6 X 9.6 X 0.64 mm in less than 0.4 s with an accuracy in the order of 1 micrometers .

Citation Download Citation

Mitsuhiro Ishihara and Hiromi Sasaki "High-speed 3D shape measurement using a nonscanning multiple-beam confocal imaging system", Proc. SPIE 3478, Laser Interferometry IX: Techniques and Analysis, (30 June 1998); https://doi.org/10.1117/12.312975

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available