Three-dimensional microfabrication using two-photon-activated chemistry

Stephen M. Kuebler; Brian H. Cumpston; Sundaravel Ananthavel; Stephen Barlow; Jeffrey E. Ehrlich; L. L. Erskine; Ahmed A. Heikal; D. McCord-Maughon; J. Qin; Harold Roeckel; Maria Cristina Rumi; Seth R. Marder; Joseph W. Perry

doi:10.1117/12.382799

17 April 2000 Three-dimensional microfabrication using two-photon-activated chemistry

Stephen M. Kuebler, Brian H. Cumpston, Sundaravel Ananthavel, Stephen Barlow, Jeffrey E. Ehrlich, L. L. Erskine, Ahmed A. Heikal, D. McCord-Maughon, J. Qin, Harold Roeckel, Maria Cristina Rumi, Seth R. Marder, Joseph W. Perry

Author Affiliations +

Proceedings Volume 3937, Micro- and Nano-photonic Materials and Devices; (2000) https://doi.org/10.1117/12.382799
Event: Symposium on Integrated Optoelectronics, 2000, San Jose, CA, United States

Abstract

Photochemical reactions which can be activated by the simultaneous absorption of two photons provide a means for single-step fabrication of complex 3D microstructures. These types of structures are needed for a wide range of applications, including microfluidics, electrooptics, and micro-electromechanical systems. We have shown that chromophores can be engineered to have both large two-photon absorptivities as well as an efficient means for activating chemical processes, such as radical polymerization, subsequent to the photoexcitation. Chromophores designed following this strategy two-photon-activate the radical polymerization of acrylates at lower incident laser powers than conventional UV initiators. Efficient two-photon photopolymer resins based on these chromophores were used in the fabrication of complex microarchitectures, such as photonic bandgap structures and tapered waveguides. We have devised a strategy which allows this approach to be extended to other chemical systems.

Citation Download Citation

Stephen M. Kuebler, Brian H. Cumpston, Sundaravel Ananthavel, Stephen Barlow, Jeffrey E. Ehrlich, L. L. Erskine, Ahmed A. Heikal, D. McCord-Maughon, J. Qin, Harold Roeckel, Maria Cristina Rumi, Seth R. Marder, and Joseph W. Perry "Three-dimensional microfabrication using two-photon-activated chemistry", Proc. SPIE 3937, Micro- and Nano-photonic Materials and Devices, (17 April 2000); https://doi.org/10.1117/12.382799

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