Three-dimensional device characterization by high-speed cinematography

Claus Maier; Eberhard P. Hofer

doi:10.1117/12.445599

23 October 2001 Three-dimensional device characterization by high-speed cinematography

Claus Maier, Eberhard P. Hofer

Proceedings Volume 4400, Microsystems Engineering: Metrology and Inspection; (2001) https://doi.org/10.1117/12.445599
Event: Lasers in Metrology and Art Conservation, 2001, Munich, Germany

Abstract

Testing of micro-electro-mechanical systems (MEMS) for optimization purposes or reliability checks can be supported by device visualization whenever an optical access is available. The difficulty in such an investigation is the short time duration of dynamical phenomena in micro devices. This paper presents a test setup to visualize movements within MEMS in real-time and in two perpendicular directions. A three-dimensional view is achieved by the combination of a commercial high-speed camera system, which allows to take up to 8 images of the same process with a minimum interframe time of 10 ns for the first direction, with a second visualization system consisting of a highly sensitive CCD camera working with a multiple exposure LED illumination in the perpendicular direction. Well synchronized this provides 3-D information which is treated by digital image processing to correct image distortions and to perform the detection of object contours. Symmetric and asymmetric binary collisions of micro drops are chosen as test experiments, featuring coalescence and surface rupture. Another application shown here is the investigation of sprays produced by an atomizer. The second direction of view is a prerequisite for this measurement to select an intended plane of focus.

Citation Download Citation

Claus Maier and Eberhard P. Hofer "Three-dimensional device characterization by high-speed cinematography", Proc. SPIE 4400, Microsystems Engineering: Metrology and Inspection, (23 October 2001); https://doi.org/10.1117/12.445599

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