Effects of laser parameters on plume characteristics and ablation rate

Zongli Li; Sohzeom Yow; Lena Lui; Nikolai Leopoldovich Yakovlev; Peter M. Moran

doi:10.1117/12.470649

18 June 2002 Effects of laser parameters on plume characteristics and ablation rate

Zongli Li, Sohzeom Yow, Lena Lui, Nikolai Leopoldovich Yakovlev, Peter M. Moran

Proceedings Volume 4637, Photon Processing in Microelectronics and Photonics; (2002) https://doi.org/10.1117/12.470649
Event: High-Power Lasers and Applications, 2002, San Jose, California, United States

Abstract

Laser ablation of polyimide and polycarbonate by 3rd harmonic Nd-YAG laser is studied using secondary ion mass spectrometry (SIMS) and confocal microcopy. The ablated debris' were collected on an H-terminated Si substrate and then analyzed using SIMS. Mass resolved images of collected debris showed near-hemispherical distribution of hydrocarbon, nitrogen containing compounds with radius up to 0.7 mm. Ablation in different gases revealed that the nitrogen and oxygen containing compounds are formed because of a reaction of the hot plume with air in the course of thermal dissociation of O₂ and oxygen-assisted dissociation of N₂. The shape and size of the microvia were measured using confocal microscopy through a polished edge of the polymer target. The via drilled in pulse-by- pulse ablation (PBPA) was found to be deeper than that drilled in continuous ablation (CA) with the same number of pulses. This is due to shading of the laser light by the plume from the preceding pulse. In result, explosive boiling occurs during PBPA, while normal vaporization dominates during CA. Several mechanisms of etching of side walls are discussed.

Citation Download Citation

Zongli Li, Sohzeom Yow, Lena Lui, Nikolai Leopoldovich Yakovlev, and Peter M. Moran "Effects of laser parameters on plume characteristics and ablation rate", Proc. SPIE 4637, Photon Processing in Microelectronics and Photonics, (18 June 2002); https://doi.org/10.1117/12.470649

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