Inhomogeneous polarization in optical system design

Thomas G. Brown

doi:10.1117/12.486472

23 December 2002 Inhomogeneous polarization in optical system design

Thomas G. Brown

Proceedings Volume 4832, International Optical Design Conference 2002; (2002) https://doi.org/10.1117/12.486472
Event: International Optical Design Conference 2002, 2002, Tucson, AZ, United States

Abstract

It has long been understood that high numerical aperture optical systems exhibit polarization inhomogeneities in the focal plane. We take a particular interest in high NA systems with illumination which is inhomogeneously polarized in the pupil plane. Such systems may have a variety of different polarization distributions in the image plane; these polarizations need not be transverse to the optical axis, and some of the most interesting cases contain a central diffracion-limited spot which is polarized along the optical axis. This paper will describe experiments demonstrating this type of illumination in imaging and discuss the creative use of inhomogeneously polarized illumination in optical system design, emphasizing applications to microscopy/inspection and lithography.

Citation Download Citation

Thomas G. Brown "Inhomogeneous polarization in optical system design", Proc. SPIE 4832, International Optical Design Conference 2002, (23 December 2002); https://doi.org/10.1117/12.486472

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