Study on thermal analysis of polishing optical mirror surface

Ping Wang; Huifang Chen

doi:10.1117/12.674099

30 May 2006 Study on thermal analysis of polishing optical mirror surface

Ping Wang, Huifang Chen

Proceedings Volume 6148, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes; 61480N (2006) https://doi.org/10.1117/12.674099
Event: 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2005, Xian, China

Abstract

Heat generated during polishing optical mirror surface is studied referring to tribology theory in this paper. The formula shows that the main factors of affecting heat generated include: rotating speed of polishing tool and mirror ω, load applied by polishing tool P, size of powder, and the material of mirror. Given the experiential value of parameters in the formula, heat generated by polishing are worked out. Based on the working-out result, thermal field, deformation and stress field of the polishing mirror are gotten by use of Finite Element Analysis software ANSYS. ANSYS's analysis shows the max deformation is 1.08μm on the being polished area.

Citation Download Citation

Ping Wang and Huifang Chen "Study on thermal analysis of polishing optical mirror surface", Proc. SPIE 6148, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 61480N (30 May 2006); https://doi.org/10.1117/12.674099

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