Micro-fabrication by femtosecond laser pulses

Yudong Li; Jianguo Tian; Qian Sun

doi:10.1117/12.674220

9 June 2006 Micro-fabrication by femtosecond laser pulses

Yudong Li, Jianguo Tian, Qian Sun

Proceedings Volume 6149, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 61490X (2006) https://doi.org/10.1117/12.674220
Event: 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2005, Xian, China

Abstract

Optical microstructures are very important for the realization of multifunctional optics and photonics devices. In the last decade, with the development of commercial femtosecond laser, it has been proven that micro-structuring with femtosecond laser pulses is an excellent tool for free design micro-fabrication of almost all kinds of materials. With the filament, spatially scanning and other methods, many types of 0 to 3-dimensional optical microstructures, including optical memory, waveguides, gratings, couplers and photonic crystals, were produced successfully inside a wide variety of transparent materials of solid state and also liquid state. Here we reviewed the proceeding of the micro-fabrication technology by femtosecond laser pulses in the last few years.

Citation Download Citation

Yudong Li, Jianguo Tian, and Qian Sun "Micro-fabrication by femtosecond laser pulses", Proc. SPIE 6149, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 61490X (9 June 2006); https://doi.org/10.1117/12.674220

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