A calibration method of machine vision measurement system by using a micro displacement stage

Ming Zhou; Yuekang Shan; Yu Ji

doi:10.1117/12.678607

23 February 2006 A calibration method of machine vision measurement system by using a micro displacement stage

Ming Zhou, Yuekang Shan, Yu Ji

Proceedings Volume 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 61503B (2006) https://doi.org/10.1117/12.678607
Event: 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2005, Xian, China

Abstract

This paper introduces a calibration method of machine vision measurement by a micro motion. This method is the combination of micro-displacement and machine vision measurement technology. It could get the system's resolution in a short time. The evaluation of the system's performance is realized automatically. It is possible to improve the reliability of measurement system by analyzing measurement results in real time.

Citation Download Citation

Ming Zhou, Yuekang Shan, and Yu Ji "A calibration method of machine vision measurement system by using a micro displacement stage", Proc. SPIE 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 61503B (23 February 2006); https://doi.org/10.1117/12.678607

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