Study on experiment of grinding SiC mirror with fixed abrasive

Xu Wang; Xue-jun Zhang

doi:10.1117/12.830802

20 May 2009 Study on experiment of grinding SiC mirror with fixed abrasive

Xu Wang, Xue-jun Zhang

Proceedings Volume 7282, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 72820K (2009) https://doi.org/10.1117/12.830802
Event: AOMATT 2008 - 4th International Symposium on Advanced Optical Manufacturing, 2008, Chengdu, Chengdu, China

Abstract

A brand-new technology for manufacturing SiC reflecting mirror that is different from the traditional method is adopted, which is called as fixed abrasive surfacing technology. Not only the new method achieves better mirror quality with bigger diamond in diameter quickly , but also because of the fixed motion between the abrasive and workpiece and it will be good for surface finishing. During experiment, material removal characteristic which is on SiC under certain rotation speed and pressure by W7,W5,W3.5,W1.5 pellets has been tested. Through those removal curves, we come to a conclusion that the technology not only has a higher removal rate, but also has much more stability. In addition, the surface roughness experiment is mentioned. In the first stage, we achieved a mirror with surface roughness 42.758nm rms with W7 pellets. The surface roughness is descending as we change pellets with smaller diamond in diameter . At the end of experiment, a smooth surface with roughness 1.591nm rms has been achieved after using W1.5 pellets. Experiment results indicate that the technology which manufactures SiC reflecting mirror with fixed abrasive is able to replace the traditional slurry abrasive completely in certain finishing phase and also has a great foreground in application.

Citation Download Citation

Xu Wang and Xue-jun Zhang "Study on experiment of grinding SiC mirror with fixed abrasive", Proc. SPIE 7282, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 72820K (20 May 2009); https://doi.org/10.1117/12.830802

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