Study of PZT actuated deformable aspheric polishing lap

Ziqiang Hu; Ning Ling; Junhua Pan; Wenhan Jiang

doi:10.1117/12.830808

20 May 2009 Study of PZT actuated deformable aspheric polishing lap

Ziqiang Hu, Ning Ling, Junhua Pan, Wenhan Jiang

Proceedings Volume 7282, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 72820Q (2009) https://doi.org/10.1117/12.830808
Event: AOMATT 2008 - 4th International Symposium on Advanced Optical Manufacturing, 2008, Chengdu, Chengdu, China

Abstract

In aspheric mirror polishing progress, the deformable polishing lap can change the lap surface to fit the surface of aspheric optical mirror. A novel method of designing deformable polishing lap is brought forward by using PZT actuator. It consists of an aluminum disk which can change surface profile continuously under the control of PZT actuators. When the deformable aspherical polishing lap moves on the surface of aspherical mirror, the needed deformation of each PZT actuator is calculated at any location. After each PZT actuator deforming, the surface profile of deformable aspherical polishing lap is changed to an off-axis surface of aspheric optical mirror at that location. In this paper, the rational of the PZT actuated deformable aspheric polishing lap is introduced,and the calculation method of deformation is explored also.By using finite element method, the deforming capability of the PZT actuated deformable aspheric polishing lap is simulated to reform a hyperboloid mirror with diameter 350mm,k=-1.112155,R=840.0 mm. Two type of PZT actuator arrangements are compared and analyzed. The results show that the PZT actuated deformable aspheric polishing lap can reshape to fit the surface of aspheric mirror and the RMS is less than 2um.

Citation Download Citation

Ziqiang Hu, Ning Ling, Junhua Pan, and Wenhan Jiang "Study of PZT actuated deformable aspheric polishing lap", Proc. SPIE 7282, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 72820Q (20 May 2009); https://doi.org/10.1117/12.830808

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