Organic thin film transistor with a simplified planar structure

Lei Zhang; Jungsheng Yu; Jian Zhong; Yadong Jiang

doi:10.1117/12.831018

21 May 2009 Organic thin film transistor with a simplified planar structure

Lei Zhang, Jungsheng Yu, Jian Zhong, Yadong Jiang

Proceedings Volume 7282, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 728235 (2009) https://doi.org/10.1117/12.831018
Event: AOMATT 2008 - 4th International Symposium on Advanced Optical Manufacturing, 2008, Chengdu, Chengdu, China

Abstract

Organic thin film transistor (OTFT) with a simplified planar structure is described. The gate electrode and the source/drain electrodes of OTFT are processed in one planar structure. And these three electrodes are deposited on the glass substrate by DC sputtering technology using Cr/Ni target. Then the electrode layouts of different width length ratio are made by photolithography technology at the same time. Only one step of deposition and one step of photolithography is needed while conventional process takes at least two steps of deposition and two steps of photolithography. Metal is first prepared on the other side of glass substrate and electrode is formed by photolithography. Then source/drain electrode is prepared by deposition and photolithography on the side with the insulation layer. Compared to conventional process of OTFTs, the process in this work is simplified. After three electrodes prepared, the insulation layer is made by spin coating method. The organic material of polyimide is used as the insulation layer. A small molecular material of pentacene is evaporated on the insulation layer using vacuum deposition as the active layer. The process of OTFTs needs only three steps totally. A semi-auto probe stage is used to connect the three electrodes and the probe of the test instrument. A charge carrier mobility of 0.3 cm² /V s, is obtained from OTFTs on glass substrates with and on/off current ratio of 10⁵. The OTFTs with the planar structure using simplified process can simplify the device process and reduce the fabrication cost.

Citation Download Citation

Lei Zhang, Jungsheng Yu, Jian Zhong, and Yadong Jiang "Organic thin film transistor with a simplified planar structure", Proc. SPIE 7282, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 728235 (21 May 2009); https://doi.org/10.1117/12.831018

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KEYWORDS

Electrodes

Optical lithography

Transistors

Thin films

Glasses

Metals

Coating

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