Paper
17 October 2012 Optical coherence tomography and optical smart sensing
Author Affiliations +
Proceedings Volume 8421, OFS2012 22nd International Conference on Optical Fiber Sensors; 84210E (2012) https://doi.org/10.1117/12.975269
Event: OFS2012 22nd International Conference on Optical Fiber Sensor, 2012, Beijing, China
Abstract
Optical coherence tomography (OCT) has been developed particularly for biomedical and industrial fields owing to the advantage of in vivo real time optical imaging with a micro-scale high resolution. Depending on specific imaging purposes, various dedicated OCT systems have been proposed and implemented. We present the recent achievements of OCT systems and their applications such as monitoring of cross-sectional biological specimen, discrimination of living human breast cancer cells, and characterization of wet pad surface in chemical mechanical polishing (CMP) process.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Byeong Ha Lee, Woo June Choi, Eun Jung Min, Kwan Seob Park, and Young Ho Kim "Optical coherence tomography and optical smart sensing", Proc. SPIE 8421, OFS2012 22nd International Conference on Optical Fiber Sensors, 84210E (17 October 2012); https://doi.org/10.1117/12.975269
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KEYWORDS
Optical coherence tomography

Imaging systems

Chemical mechanical planarization

Surface finishing

3D image reconstruction

Polishing

Radium

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