Paper
21 February 2013 Eight-fold photonic quasi-crystal fabricated by prism assisted holographic lithography
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Abstract
We demonstrate that a 2D eight-fold photonic quasi-crystal (PQC) can be produced by a specially designed prism via single-exposure holographic lithography. Compared with traditional eight beams in half space for eight-fold quasi-crystal, we only use 5 beams in ¼ space. From group theory and computer simulation, we have verified the feasibility of the particular configuration and observed the simulated patterns. Experimental results observed under SEM agree well with the expectation, confirming that the specially designed prism can be used to fabricate eight-fold photonic quasi-crystal. This prism-assisted holographic lithography using less exposure beams may benefit mass production of complex quasi-structures.
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Kai Shen, Guomin Jiang, and Michael R Wang "Eight-fold photonic quasi-crystal fabricated by prism assisted holographic lithography", Proc. SPIE 8632, Photonic and Phononic Properties of Engineered Nanostructures III, 86320G (21 February 2013); https://doi.org/10.1117/12.2004355
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CITATIONS
Cited by 2 scholarly publications and 3 patents.
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KEYWORDS
Prisms

Holography

Lithography

Photonic crystals

Photoresist materials

Beam splitters

Scanning electron microscopy

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