White light interferometer with color CCD for 3D-surface profiling of microsystems

Paul Kumar Upputuri; Manojit Pramanik; Krishna Mohan Nandigana; Mahendra Prasad Kothiyal

doi:10.1117/12.2081117

4 March 2015 White light interferometer with color CCD for 3D-surface profiling of microsystems

Paul Kumar Upputuri, Manojit Pramanik, Krishna Mohan Nandigana, Mahendra Prasad Kothiyal

Proceedings Volume 9302, International Conference on Experimental Mechanics 2014; 93023R (2015) https://doi.org/10.1117/12.2081117
Event: International Conference on Experimental Mechanics 2014, 2014, Singapore, Singapore

Abstract

White light interferometry (WLI) is a state-of-the-art technique for high resolution full-filed 3-D surface profiling of Microsystems. However, the WLI is rather slow, because the number of frames to be recorded and evaluated is large compared to the single wavelength phase shifting interferometry. In this paper, we combine white light interferometer with a single-chip color CCD camera which makes the measurement faster, simpler, and cost-effective. The red-bluegreen (RGB) color interferogram stored in a computer is then decomposed into its individual components and corresponding phase maps for red, green, and blue components are calculated independently. The usefulness of the technique is demonstrated on reflective micro-scale-samples.

Citation Download Citation

Paul Kumar Upputuri, Manojit Pramanik, Krishna Mohan Nandigana, and Mahendra Prasad Kothiyal "White light interferometer with color CCD for 3D-surface profiling of microsystems ", Proc. SPIE 9302, International Conference on Experimental Mechanics 2014, 93023R (4 March 2015); https://doi.org/10.1117/12.2081117

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available