PROCEEDINGS VOLUME 5116
MICROTECHNOLOGIES FOR THE NEW MILLENNIUM 2003 | 19-21 MAY 2003
Smart Sensors, Actuators, and MEMS
Editor Affiliations +
IN THIS VOLUME

11 Sessions, 106 Papers, 0 Presentations, 0 Posters
Materials  (8)
Sensors I  (7)
MEMS I  (6)
Actuators I  (5)
Actuators II  (7)
Sensors II  (7)
MEMS II  (7)
MEMS III  (9)
MICROTECHNOLOGIES FOR THE NEW MILLENNIUM 2003
19-21 May 2003
Maspalomas, Gran Canaria, Canary Islands, Spain
Materials
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.499010
Kumaresa Somasundram, David Cole, Cormac McNamara, Anne Boyle, Paul McCann, Claire Devine, Andrew Nevin
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.502741
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.499002
Olivier Dufaud, Herve Le Gall, Serge Corbel
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.498777
Yongqing Fu, Hejun Du
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.498184
Seon Jeong Kim, Sang Jun Park, Sun I. Kim, In Young Kim, Young Moo Lee, Hee Chan Kim, Taek Dong Chung
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.498713
Andreas Schneider, Susan Rea, Ejaz Huq, William Bonfield
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.498779
S. A. Ibrahim, M. S. Ahmed, R. M. Ramadan, Adel M Amer
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.488346
Sensors I
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.498491
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.501464
Jorge Amirola, Angel Rodiguez, Luis Castaner
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.498660
Markus Loehndorf, Stefani Dokupil, Manfred Ruehrig, Joachim Wecker, Eckhard Quandt
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.500012
Sergio Bermejo, Guillermo Bedoya, Joan Cabestany
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.498634
Neus Sabate, Isabel Gracia, Carles Cane, Jordi Puigcorbe, Judith Cerda, Joan Ramon Morante, Javier Berganzo
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.498995
Rainer J. Fasching, Ye Tao, Kyle Hammerick, Fritz B. Prinz
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.499065
MEMS I
Thomas George
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.497796
Viorel Dragoi, Thomas Glinsner, Gerald Mittendorfer, Bernhard Wieder, Paul Lindner
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.499077
Hicham Mahfoz-Kotb, Anne-Claire Salaun, Tayeb Mohammed-Brahim, Nathalie Coulon, Olivier Bonnaud, Jean-Yves Mevellec
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.498860
Estefania Abad, Roger W. Whatmore, Qi Zhang, Zhaorong Huang
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.499780
Ghouti Senouci-Bereksi, Abdelatif Benchaib
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.498953
Actuators I
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.498885
Yi Chiu, Meng-Yu Wu, Han-Ping D. Shieh, Yi Ting Sun, Hsueh-Liang Chou, Wensyang Hsu
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.498721
Athanassia Athanassiou, Maria Kalyva, Kleanthi Lakiotaki, Savas Georgiou, Costas Fotakis
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.501327
Jochen Schlick, Detlef Zuehlke
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.499009
Maxim Zalalutdinov, Keith L. Aubin, Christopher Michael, Robert B. Reichenbach, Tuncay Alan, Alan T. Zehnder, Brian H. Houston, Jeevak M. Parpia, Harold G. Craighead
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.499107
Actuators II
Michael J. Sinclair, Kerwin Wang
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.499129
N. Yu, T. Somphone
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.499595
Manuel Puig-Vidal, Jaime Lopez, Pere Miribel, Enric Montane, Jose M. Lopez-Villegas, Josep Samitier, Carole Rossi, Thierry Camps, Maxime Dumonteuil
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.501504
Nicolas Delorme, Cyril Condemine, Daniel Barbier
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.498787
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.499048
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.498626
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.498920
Sensors II
Byung Hwa Park, Yoon Seok Park, Young-Soo Sohn, Dean Neikirk
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.499025
Montserrat Calleja, Peter A Rasmussen, Alicia Johansson, Anja Boisen
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.498934
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.499483
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.501450
P. Suresh Kumar, C. P.G. Vallabhan, V. P.N. Nampoori, P. Radhakrishnan
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.499059
Jordi Teva, Gabriel Abadal, Xavier Jordà, Xavier Borrise, Zachary Davis, Nuria Barniol
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.501339
Xiaowei Liu, Mingxue Huo, Weiping Chen, Qiang Chen
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.498848
MEMS II
Jong-Hoon Kim, Jeong-Gil Kim, Soon-Chang Yeon, Jun-Hee Hahn, Ho-Young Lee, Yong-Hyup Kim
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.504384
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.498961
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.500603
Luca Berdondini, Martin Kalbac, Sebastien Gautsch, Maurizio Gullo, Urs Staufer, Milena Koudelka-Hep, Nico F de Rooij
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.488975
Guillaume Marinier, Stefan Dilhaire, Luis David Patino Lopez, Mohamed Benzohra
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.498827
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.499112
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.498898
Optical Applications
Flavio Pardo, Vladimir A. Aksyuk, Susanne Arney, H. Bair, Nagesh R. Basavanhally, David J. Bishop, Gregory R. Bogart, Cristian A. Bolle, J. E. Bower, et al.
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.499075
Daniel O. Lopez, Flavio Pardo, Vladimir A. Aksyuk, M. E. Simon, Herbert R. Shea, Dan M. Marom, David T. Neilson, Raymond A. Cirelli, Fred P. Klemens, et al.
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.504381
Vladimir I. Vaganov, Sebastiaan R. in 't Hout, Nickolai Belov
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.502020
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.499674
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.498870
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.498969
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.498932
Raghied M. H. Atta, Graham J. Ensell, Alan G. R. Evans, Jason C. E. Png, Graham T. Reed
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.498967
RF/Integrated Circuits
Katia M. Grenier, Victor Lubecke, Fouad Bouchriha, Laurent Rabbia, David Dubuc, Patrick Pons, Robert Plana
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.499052
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.499017
Jeffrey S. Fu, Jiaoyun Zhou, Yilong Lu, Jianguo Ma, Zhongxiang Shen
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.487702
Keith L. Aubin, Maxim Zalalutdinov, Robert B. Reichenbach, Brian H. Houston, Alan T. Zehnder, Jeevak M. Parpia, Harold G. Craighead
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.499109
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.499135
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.498940
Jean Baubert, Morvan Salez, Yan Delorme, Patrick Pons, Gregory Goltsman, Harald Merkel, Benoit Leconte
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.499158
Faouzi Boussaha, Morvan C. Salez, Yan Delorme, Alexandre Feret, Benoit Lecomte, Karl Westerberg, Michel Chaubet
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.498857
MEMS III
Sandra Bermejo, Pablo Rafael Ortega, Luis Castaner
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.498195
Remy Charavel, Benoit Olbrechts, Jean-Pierre Raskin
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.498098
Marc Fouchier, Pierre Eyben, David Alvarez, Natasja Duhayon, MingWei Xu, Sywert Brongersma, Judit Lisoni, Wilfried Vandervorst
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.498164
Henk W. van Zeijl, John Slabbekoorn
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.499104
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.498918
Fu-Tien Weng, Hung-Jen Hsu, Chih-Kung Chang, Yu-Kung Hsiao
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.501442
Hung-Jen Hsu, Fu-Tien Weng, Chih-Kung Chang, Yu-Kung Hsiao
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.501330
Jimin Chen, Xubao Wang, Tiechuan Zuo
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.501147
Poster Session
Wei Dong, Xindong Zhang, Caixia Liu, Cuiping Jia, Jianxuan Pan, Ping Ji, Weiyou Chen
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.498266
Guillaume Marinier, Eric Joubert, Mohamed Benzohra, Mohamed Ketata
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.498829
Jinni Tsay, Cheng-Kuo Sung, Liang-Qing Su
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.498874
Sami K Myllymaki, E. Ristolainen, P. Heino, A. Lehto, K. Varjonen
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.499329
Michal Malachowski, Jadwiga Olesik
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.499547
Jingxin Dong, Xiaochun Wu
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.488734
Remy Charavel, Jean Laconte, Jean Pierre Raskin
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.498107
Qing Chao Tian, Jian Shen Wu
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.498179
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.498190
Sergio Arana, Enrique Castano, Javier Gracia
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.498209
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.498536
Qun Wu, Jiahui Fu, Xuemai Gu, Huajuan Shi, Jongchul Lee
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.498706
RF/Integrated Circuits
Jian Zhu, Bailing Zhou, Jinting Lin, Yuanwei Yu, Le Lu
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.498844
Poster Session
Zhenhong Jia, Chuzhe Tu, Jun Zhou, Rui Li
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.498856
Seon Jeong Kim, Seoung Gil Yoon, In Young Kim, Young Hee Lee, Kay Hyeok An, Nam Gyun Kim, Chul Un Hong
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.498878
Heiko Schafer, Steffen Chemnitz, Stephanie Schumacher, Volodymyr Koziy, Alexander Fischer, Alfred J. Meixner, Dietmar Ehrhardt, Markus Bohm
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.498972
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.498986
Steffen Chemnitz, Heiko Schafer, Stephanie Schumacher, Volodymyr Koziy, Alexander Fischer, Alfred J. Meixner, Dietmar Ehrhardt, Markus Bohm
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.498994
Maria Jesus Lopez-Bosque, Jose Antonio Plaza, Joaquin Santander, Isabel Gracia, Carles Cane, Juergen Wollenstein, Emmanuel Moretton, Armin Lambrecht, Kari Schjolberg-Henriksen
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.499016
Doo-Sun Choi, Tae-Jin Je, K.H. Hwang, J.H. Moon
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.499111
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.499142
Viktor O. Lysyuk, Leonid V. Poperenko, Vasiliy S. Staschuk, Mykola I. Kluy
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.499147
Bohdan K. Kotlyarchuk, Dmytro I. Popovych, Andrew Serednytski
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.499185
Jadwiga Olesik, Michal Janusz Malachowski, Zygmunt Olesik
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.499250
Vladimir Nesterov, Petcharin Pornnoppadol, Uwe Brand, Ralph Wilke, M. Schmidt, Stephanus Buettgenbach
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.499264
Nikolay Ivanovich Mukhurov, Georgy I. Efemov
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.499324
Sungcheon Jung, Yoonshik Hong, Junghyun Lee, Hyunkee Lee
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.501287
Kazuhiko Yamanouchi, Toru Ishii
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.501307
Olena Berger, Thomas Hoffmann, Wolf-Joachim Fischer, Valeri Melev
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.501930
Vladimir I. Vaganov, Nickolai Belov, Sebastiaan R. in 't Hout
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.502022
Vladimir I. Vaganov, Nickolai Belov, Sebastiaan R. in 't Hout
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.502023
MEMS III
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.510486
MEMS I
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.510487
Poster Session
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.512084
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.512086
Tao Wu, ChoJui Tay, Chenggen Quan, Shihua Wang, HuaiMin Shang
Proceedings Volume Smart Sensors, Actuators, and MEMS, (2003) https://doi.org/10.1117/12.514242
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