Hysteretic scattering-based, super-resolution mapping of silicon nanostructures

Po-Hsueh Tseng; Kentaro Nishida; Pang-Han Wu; Yu-Lung Tang; Yu-Chieh Chen; Chi-Yin Yang; Jhen-Hong Yang; Wei-Ruei Chen; Mihail Petrov; Kuo-Ping Chen; Shi-Wei Chu

doi:10.1117/12.2648783

13 March 2023 Hysteretic scattering-based, super-resolution mapping of silicon nanostructures

Po-Hsueh Tseng, Kentaro Nishida, Pang-Han Wu, Yu-Lung Tang, Yu-Chieh Chen, Chi-Yin Yang, Jhen-Hong Yang, Wei-Ruei Chen, Mihail Petrov, Kuo-Ping Chen, Shi-Wei Chu

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Proceedings Volume PC12426, Silicon Photonics XVIII; PC1242604 (2023) https://doi.org/10.1117/12.2648783
Event: SPIE OPTO, 2023, San Francisco, California, United States

Abstract

We unraveled a novel optical bistable state in amorphous silicon nanocuboids, featuring an abrupt super-linear jump of scattering intensity during hysteretic switching. The effective intensity dependency reaches 19th power, leading to an nonlinear index n2 as large as 5 μm2/mW, 7-order larger than the bulk value and well explained through coupled electromagnetic and photothermal simulation. Combining the ultralarge super-linear response with dark-field laser scanning microscopy, 3.5-times resolution enhancement was achieved, without any need of temporal/spatial excitation modulation. This hysteresis scattering not only sets a benchmark in optical super-resolution technique, but also suggests further optical signal processing potentials.

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Po-Hsueh Tseng, Kentaro Nishida, Pang-Han Wu, Yu-Lung Tang, Yu-Chieh Chen, Chi-Yin Yang, Jhen-Hong Yang, Wei-Ruei Chen, Mihail Petrov, Kuo-Ping Chen, and Shi-Wei Chu "Hysteretic scattering-based, super-resolution mapping of silicon nanostructures", Proc. SPIE PC12426, Silicon Photonics XVIII, PC1242604 (13 March 2023); https://doi.org/10.1117/12.2648783

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KEYWORDS

Scattering

Silicon

Super resolution

Nanostructures

Nonlinear optics

Electromagnetic scattering

Laser scattering

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