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This presentation summarizes recent work at the Laser Thermal Laboratory on the laser chemical processing of two-dimensional (2D) layered materials and the laser-aided atomic laser etching (ALEt) of semiconductors. Spatially selective laser doping of transition metal dichalcogenides (TMDCs), reversible writing of dopant patterns in graphene and fabrication of functional devices have been accomplished. Digital self-limited etching of semiconductors has been demonstrated.
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Yoonsoo Rho, Matthew Eliceiri, Costas P. Grigoropoulos, Runxuan Li, "Laser chemical processing of nanomaterials," Proc. SPIE PC12939, High-Power Laser Ablation VIII, PC1293908 (11 April 2024); https://doi.org/10.1117/12.3010486