Some New Laser Processing Applications In Microelectronics

Donald L. Parker

doi:10.1117/12.934942

9 August 1983 Some New Laser Processing Applications In Microelectronics

Donald L. Parker

Proceedings Volume 0385, Laser Processing of Semiconductor Devices; (1983) https://doi.org/10.1117/12.934942
Event: 1983 Los Angeles Technical Symposium, 1983, Los Angeles, United States

Abstract

Currently widespread commercial applications of laser processing in the microelectronics industry is limited to resistor trimming by micromachining, link blowing for the repair of very large memory circuits, mask repair, and wafer labeling. This paper describes several potential applications for laser processing which are being investigated at Texas A&M. The areas are given below with a brief summary of the results.

Citation Download Citation

Donald L. Parker "Some New Laser Processing Applications In Microelectronics", Proc. SPIE 0385, Laser Processing of Semiconductor Devices, (9 August 1983); https://doi.org/10.1117/12.934942

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