Analysis Of The Energy Broadening Of Liquid Metal Ion Sources

M A Gesley; D L Larson; L W Swanson; C H Hinrichs

doi:10.1117/12.942325

18 June 1984 Analysis Of The Energy Broadening Of Liquid Metal Ion Sources

M A Gesley, D L Larson, L W Swanson, C H Hinrichs

Proceedings Volume 0471, Electron-Beam, X-Ray, and Ion-Beam Techniques for Submicrometer Lithographies III; (1984) https://doi.org/10.1117/12.942325
Event: 1984 Microlithography Conferences, 1984, Santa Clara, United States

Abstract

The increase in the beam energy spread <AE> of liquid metal ion sources with particle mass (rn) and current (I) is analyzed in terms of the pairwise coulomb interactions of particles emitted from a spherical emitter according to Poisson statistics. According to model calculations <AE> cc m1/4 11/2 which agrees with experimental results. In addition, a shift in the average energy of the particles due to the mutual interactions is predicted by the model calculations.

Citation Download Citation

M A Gesley, D L Larson, L W Swanson, and C H Hinrichs "Analysis Of The Energy Broadening Of Liquid Metal Ion Sources", Proc. SPIE 0471, Electron-Beam, X-Ray, and Ion-Beam Techniques for Submicrometer Lithographies III, (18 June 1984); https://doi.org/10.1117/12.942325

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