A Novel, High Contrast Positive Photoresist System

Richard E. Hopla; Andrew J. Blakeney; Paulette D. Wright

doi:10.1117/12.947847

18 April 1985 A Novel, High Contrast Positive Photoresist System

Richard E. Hopla, Andrew J. Blakeney, Paulette D. Wright

Proceedings Volume 0539, Advances in Resist Technology and Processing II; (1985) https://doi.org/10.1117/12.947847
Event: 1985 Microlithography Conferences, 1985, Santa Clara, United States

Abstract

For the past several years the trend in VLSI technology has been toward attaining higher and higher pattern densities, which requires the ability to print him and smaller geometries over steps. Concurrently, the increasing use of step and repeat technology has allowed placing less emphasis on throughput and more on process control. It has been predicted that the ability to achieve contrasts during processing of greater than 5 would allow wet processing to give more nearly vertical wall angles and minimize the variation in linewidth over steps. This paper will discuss one such system having a contrast value greater than 10, demonstrating the strengths and weakness of such a material. This system has shown the capability of patterning less than 0.5μm features on planar substrates at full film thickness and substantial exposure latitude, with reduced linewidth variation over steps as compared to more conventional materials. The impact of various processing parameters will be discussed, including agitation and temperature. The ability of this system to generate a lift-off profile in one step will also be examined.

Citation Download Citation

Richard E. Hopla, Andrew J. Blakeney, and Paulette D. Wright "A Novel, High Contrast Positive Photoresist System", Proc. SPIE 0539, Advances in Resist Technology and Processing II, (18 April 1985); https://doi.org/10.1117/12.947847

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available