High-Resolution Angle-Resolved X-Ray Scattering From Mirrors And Multilayers

Tetsuya Ishikawa; Tadashi Matsushita; Atsuo Iida

doi:10.1117/12.964372

21 October 1986 High-Resolution Angle-Resolved X-Ray Scattering From Mirrors And Multilayers

Tetsuya Ishikawa, Tadashi Matsushita, Atsuo Iida

Proceedings Volume 0640, Grazing Incidence Optics; (1986) https://doi.org/10.1117/12.964372
Event: 1986 Technical Symposium Southeast, 1986, Orlando, United States

Abstract

Angle resolved X-ray scattering was measured from flat mirrors and synthetic wultilayers using crystal collimator and analyzer with a resolution of 4 arc sec at 1.54 A. The scattering a few hundreds arc sec below and above the specular reflection from the mirror was intepreted to arise from the slope errors of the surface. Strong correlations between the angular broadening of the Bragg-diffracted beam from the multilayer and the surface quality of the substrate suggested that the multilayer mimics the slope distribution of the substrate.

Citation Download Citation

Tetsuya Ishikawa, Tadashi Matsushita, and Atsuo Iida "High-Resolution Angle-Resolved X-Ray Scattering From Mirrors And Multilayers", Proc. SPIE 0640, Grazing Incidence Optics, (21 October 1986); https://doi.org/10.1117/12.964372

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