Multilayer X-Ray Mirrors; The State Of The Art.

M P Bruijn; J. Verhoeven; E. Puik; M J van der Wiel

doi:10.1117/12.948770

16 December 1988 Multilayer X-Ray Mirrors; The State Of The Art.

M P Bruijn, J. Verhoeven, E. Puik, M J van der Wiel

Proceedings Volume 0984, X-Ray Multilayers in Diffractometers, Monochromators, and Spectrometers; (1988) https://doi.org/10.1117/12.948770
Event: 32nd Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1988, San Diego, CA, United States

Abstract

A review is given of the techniques to produce multilayer coatings for soft X-ray reflection. Current work of the improvements of the energy resolution of these systems is described. The state of the art in the production of imaging objectives is reviewed.

Citation Download Citation

M P Bruijn, J. Verhoeven, E. Puik, and M J van der Wiel "Multilayer X-Ray Mirrors; The State Of The Art.", Proc. SPIE 0984, X-Ray Multilayers in Diffractometers, Monochromators, and Spectrometers, (16 December 1988); https://doi.org/10.1117/12.948770

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