The main feature of these structures is that one can manipulate the phase behavior by modifying some of the geometrical parameters of the nano-antennas in order to achieve the required phase shift values for the desired applications. The first important step in experimentally obtaining a plasmonic metasurface structures is the electron beam lithography (EBL) followed by the lift-off method. Due to the small sizes of the gold nano-antennas and tight periodicity of the array a number of impediments can emerge in experimentally obtaining such geometries which can be overcome by the parameter optimization of the employed technologies. |
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CITATIONS
Cited by 1 patent.
Plasmonics
Electron beam lithography
Silicon
Gold
Polymethylmethacrylate
Spiral phase plates
Ultrasonography