Imaging ellipsometer with large field-of-view

Liyuan Gu; Aijun Zeng; Shiyu Hu; Qiao Yuan; Weilin Cheng; Shanhua Zhang; Guohang Hu; Hongbo He; Huijie Huang

doi:10.1117/12.2247848

24 November 2016 Imaging ellipsometer with large field-of-view

Liyuan Gu, Aijun Zeng, Shiyu Hu, Qiao Yuan, Weilin Cheng, Shanhua Zhang, Guohang Hu, Hongbo He, Huijie Huang

Proceedings Volume 10023, Optical Metrology and Inspection for Industrial Applications IV; 1002315 (2016) https://doi.org/10.1117/12.2247848
Event: SPIE/COS Photonics Asia, 2016, Beijing, China

Abstract

A polarizer-compensator-sample-analyzer (PCSA) imaging ellipsometer with large field of view is presented. The sample is imaged on a CCD sensor by a telecentric imaging system and its tilt is monitored by an optical autocollimator. The sample, the telecentric imaging system and the CCD sensor satisfy the Scheimpflug condition. In measurement, the light extinction measurement method and the four quadrants average method are used to improve the accuracy. In experiments, a chromium thin film sample is measured by the imaging ellipsometer and a spectroscopic ellipsometer. The measurement results by two ellipsometers are consistent. The usefulness of the imaging ellipsometer is verified.

Citation Download Citation

Liyuan Gu, Aijun Zeng, Shiyu Hu, Qiao Yuan, Weilin Cheng, Shanhua Zhang, Guohang Hu, Hongbo He, and Huijie Huang "Imaging ellipsometer with large field-of-view", Proc. SPIE 10023, Optical Metrology and Inspection for Industrial Applications IV, 1002315 (24 November 2016); https://doi.org/10.1117/12.2247848

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