PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
In industrial laser micro processing, throughput is as important as process quality. Treating large areas in minimum time is pivotal in achieving reduced unit costs in high-volume production. Excimer lasers meet the requirements for clean and precise structuring and enable the smallest structures in an efficient way. The latest technical developments in high power excimer lasers is bound to take cost-efficient UV-laser micro processing to the next level and bridges the gap between achievable precision and achievable throughput. New excimer laser developments and beam concepts together with latest performance data for upscaling both UV power and UV pulse energy will be the topic of this paper against the background of upcoming market trends and high volume applications.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
The alert did not successfully save. Please try again later.
Ralph Delmdahl, Oliver Haupt, Igor Bragin, Hans-Stephan Albrecht, "Power and pulse energy scaling for high-volume UV-laser microprocessing," Proc. SPIE 10092, Laser-based Micro- and Nanoprocessing XI, 1009215 (17 February 2017); https://doi.org/10.1117/12.2256018