Effect Of Grating Positional Error On Moire Signal Contrast

Chang-ming Ma; Xing-qing Dai

doi:10.1117/12.949335

10 March 1989 Effect Of Grating Positional Error On Moire Signal Contrast

Chang-ming Ma, Xing-qing Dai

Proceedings Volume 1012, In-Process Optical Measurements; (1989) https://doi.org/10.1117/12.949335
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany

Abstract

This paper presents the effect of the positional error of metrological gratings on the contrast of Moire signals. The relationship between the positional error and the Moire fringe curvature has been discussed under different gap conditions. Theoretical expressions for the contrast of Moire signals have been deduced by means of geometrical approximation and diffraction principles. Agreement between the experimental results and the theoretical analysis is extremely good.

Citation Download Citation

Chang-ming Ma and Xing-qing Dai "Effect Of Grating Positional Error On Moire Signal Contrast", Proc. SPIE 1012, In-Process Optical Measurements, (10 March 1989); https://doi.org/10.1117/12.949335

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