Smart sampling for process control

Jeffrey Weintraub; Scott Warrick

doi:10.1117/12.2258031

28 March 2017 Smart sampling for process control

Jeffrey Weintraub, Scott Warrick

Proceedings Volume 10145, Metrology, Inspection, and Process Control for Microlithography XXXI; 101450S (2017) https://doi.org/10.1117/12.2258031
Event: SPIE Advanced Lithography, 2017, San Jose, California, United States

Abstract

Engineers are continually faced with decisions about how much data they can collect. In this work, we present a statistically-based smart sampling methodology which can be used to target data collection and ensure that the risk to the product is clearly understood. Smart sampling combines knowledge of the distributions of control statistics with knowledge of the run length distributions they induce to balance the cost of information against the ability to respond to anomalies. We define and explore three characteristics that any sampling plan deemed “smart” must explicitly address: control errors that are associated with basing decisions on sample data, jeopardy that is associated with uncertainty about the true condition of the process, and the switching mechanism that controls the dynamic response to the latest information about the process. We show how the interplay of these characteristics can be exploited to comprehend the merits of a sampling plan. Practical examples of optical product inspection and process defectivity control are presented and explained.

Conference Presentation

Citation Download Citation

Jeffrey Weintraub and Scott Warrick "Smart sampling for process control", Proc. SPIE 10145, Metrology, Inspection, and Process Control for Microlithography XXXI, 101450S (28 March 2017); https://doi.org/10.1117/12.2258031

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available