Reactivity of metal-oxalate EUV resists as a function of the central metal

Steven Grzeskowiak; Amrit Narasimhan; Michael Murphy; Lee Napolitano; Daniel A. Freedman; Robert L. Brainard; Greg Denbeaux

doi:10.1117/12.2258151

27 March 2017 Reactivity of metal-oxalate EUV resists as a function of the central metal

Steven Grzeskowiak, Amrit Narasimhan, Michael Murphy, Lee Napolitano, Daniel A. Freedman, Robert L. Brainard, Greg Denbeaux

Author Affiliations +

Proceedings Volume 10146, Advances in Patterning Materials and Processes XXXIV; 1014605 (2017) https://doi.org/10.1117/12.2258151
Event: SPIE Advanced Lithography, 2017, San Jose, California, United States

Abstract

the microelectronics industry. Traditional EUV photoresists have been composed of organic compounds which are moderately transparent to EUV. Resist stochastics and sensitivity can be improved by increasing the number of photons absorbed. Molecular organometallic resists are a type of metal containing resist aimed at improving EUV absorption. This work focuses on studying the role of the metal center (Metal = Co, Fe, Cr) in an oxalate complex by comparing the number of absorbed photons and the photoelectron reactivity in each compound. In the study presented here, the EUV absorption coefficients are determined experimentally by measuring the transmission through a resist coated on a silicon nitride membrane using an Energetiq EQ-10M xenon plasma EUV source. Additionally, the photochemistry is evaluated by monitoring outgassing reaction products. This particular resist platform eliminates oxalate ligands when exposed to electrons or EUV photons resulting in a solubility difference between the exposed and unexposed regions. In the process, carbon dioxide is produced and is monitored using mass spectrometry, where quantitative values are obtained using a calibration technique. For the metal oxalate complexes studied, the absorption of EUV changed minimally due to the low concentrations of metal atoms. However, EUV and electron reactivity greatly changed between the three compounds likely due to the reducibility of the metal center. A correlation is shown between Esize and the reducibility of each photoresist.

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Citation Download Citation

Steven Grzeskowiak, Amrit Narasimhan, Michael Murphy, Lee Napolitano, Daniel A. Freedman, Robert L. Brainard, and Greg Denbeaux "Reactivity of metal-oxalate EUV resists as a function of the central metal", Proc. SPIE 10146, Advances in Patterning Materials and Processes XXXIV, 1014605 (27 March 2017); https://doi.org/10.1117/12.2258151

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