Numerical And Experimental Evaluations Of Multilayer Mirror For Soft X-Rays

K. Etoh; I. Kataoka; K. Ito

doi:10.1117/12.950032

27 February 1989 Numerical And Experimental Evaluations Of Multilayer Mirror For Soft X-Rays

K. Etoh, I. Kataoka, K. Ito

Proceedings Volume 1019, Thin Film Technologies III; (1989) https://doi.org/10.1117/12.950032
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany

Abstract

For the wavelength region from 24A to 44A, selection of materials used for the multi-layer mirror was done by computer simulation. The multilayers of Si02/Ni were produced by the ion beam sputtering method and evaluated by the C-K line, experimentally. In order to analyze scattering in the region of 0 ~ λ comparisons between the experimental results, and the solutions of Beckmann's theory and Extinction theory were done.

Citation Download Citation

K. Etoh, I. Kataoka, and K. Ito "Numerical And Experimental Evaluations Of Multilayer Mirror For Soft X-Rays", Proc. SPIE 1019, Thin Film Technologies III, (27 February 1989); https://doi.org/10.1117/12.950032

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