Temperature simulation at ZnO surface processed by laser interference lithography

L. Parellada-Monreal; M. Martinez-Calderón; I. Castro-Hurtado; A. Rodríguez; S. M. Olaizola; M. Gomez-Aranzadi; I. Ayerdi; E. Castaño; G. G. Mandayo

doi:10.1117/12.2266260

30 May 2017 Temperature simulation at ZnO surface processed by laser interference lithography

L. Parellada-Monreal, M. Martinez-Calderón, I. Castro-Hurtado, A. Rodríguez, S. M. Olaizola, M. Gomez-Aranzadi, I. Ayerdi, E. Castaño, G. G. Mandayo

Author Affiliations +

Proceedings Volume 10246, Smart Sensors, Actuators, and MEMS VIII; 102461G (2017) https://doi.org/10.1117/12.2266260
Event: SPIE Microtechnologies, 2017, Barcelona, Spain

Abstract

ZnO thin film on alumina has been deposited by RF sputtering and processed by two dimensional direct laser interference patterning (DLIP) using a nanosecond laser (λ=355nm). The thermodynamic and structural properties have been investigated.

Morphological characterization has shown a line-pattern structure with small alterations depending on the fluence of the laser (85 mJ/cm² or 165 mJ/cm²). In order to understand these modifications, a simulation has been carried out to model the transient temperature during the DLIP to study the temperature reached by the ZnO surface for the different fluences. Moreover, a comparison with a non-interference energy distribution pulse is also simulated to corroborate the model.

For samples processed by DLIP, a thermal annealing effect has been noticed when temperatures at the surface are between 1000K and 1800K. Due to the slow cooling process, a possible recrystallization of the material similar to a thermal treatment is obtained. For temperatures close or higher than 1800K, the material starts to ablate.

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L. Parellada-Monreal, M. Martinez-Calderón, I. Castro-Hurtado, A. Rodríguez, S. M. Olaizola, M. Gomez-Aranzadi, I. Ayerdi, E. Castaño, and G. G. Mandayo "Temperature simulation at ZnO surface processed by laser interference lithography", Proc. SPIE 10246, Smart Sensors, Actuators, and MEMS VIII, 102461G (30 May 2017); https://doi.org/10.1117/12.2266260

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