3D interferometric shape measurement technique using coherent fiber bundles

Hao Zhang; Robert Kuschmierz; Jürgen Czarske

doi:10.1117/12.2269939

26 June 2017 3D interferometric shape measurement technique using coherent fiber bundles

Hao Zhang, Robert Kuschmierz, Jürgen Czarske

Proceedings Volume 10329, Optical Measurement Systems for Industrial Inspection X; 1032924 (2017) https://doi.org/10.1117/12.2269939
Event: SPIE Optical Metrology, 2017, Munich, Germany

Abstract

In-situ 3-D shape measurements with submicron shape uncertainty of fast rotating objects in a cutting lathe are expected, which can be achieved by simultaneous distance and velocity measurements. Conventional tactile methods, coordinate measurement machines, only support ex-situ measurements. Optical measurement techniques such as triangulation and conoscopic holography offer only the distance, so that the absolute diameter cannot be retrieved directly. In comparison, laser Doppler distance sensors (P-LDD sensor) enable simultaneous and in-situ distance and velocity measurements for monitoring the cutting process in a lathe. In order to achieve shape measurement uncertainties below 1 μm, a P-LDD sensor with a dual camera based scattered light detection has been investigated. Coherent fiber bundles (CFB) are employed to forward the scattered light towards cameras. This enables a compact and passive sensor head in the future. Compared with a photo detector based sensor, the dual camera based sensor allows to decrease the measurement uncertainty by the order of one magnitude. As a result, the total shape uncertainty of absolute 3-D shape measurements can be reduced to about 100 nm.

Citation Download Citation

Hao Zhang, Robert Kuschmierz, and Jürgen Czarske "3D interferometric shape measurement technique using coherent fiber bundles", Proc. SPIE 10329, Optical Measurement Systems for Industrial Inspection X, 1032924 (26 June 2017); https://doi.org/10.1117/12.2269939

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available