Fabrication of the blazed grating for near-infrared spectroscopy

Quan Liu; Jianhong Wu; Peiliang Guo; Feng Zhou

doi:10.1117/12.2315244

20 February 2018 Fabrication of the blazed grating for near-infrared spectroscopy

Quan Liu, Jianhong Wu, Peiliang Guo, Feng Zhou

Proceedings Volume 10697, Fourth Seminar on Novel Optoelectronic Detection Technology and Application; 106974X (2018) https://doi.org/10.1117/12.2315244
Event: Fourth Seminar on Novel Optoelectronic Detection Technology and Application, 2017, Nanjing, China

Abstract

In this paper the diffraction characteristics of the blazed grating is investigated by using rigorous coupled-wave analysis, which indicates that within the near infrared broadband, the first-order diffraction efficiency can be over 10% at 1.2μm and over 65% at 2.3μm through controlling the blaze angle of the blazed grating. The blazed grating with the period of 8.33μm, the blaze angle about 7.3 degree, and the antiblaze angle about 41.8 degree has been fabricated by holographic lithography - ion beam etching. Theoretical analysis has showed that the diffraction efficiency of these blazed grating can reach 15% at 1.2μm, 73% at 2.3μm and 75% at blazed wavelength.

Citation Download Citation

Quan Liu, Jianhong Wu, Peiliang Guo, and Feng Zhou "Fabrication of the blazed grating for near-infrared spectroscopy", Proc. SPIE 10697, Fourth Seminar on Novel Optoelectronic Detection Technology and Application, 106974X (20 February 2018); https://doi.org/10.1117/12.2315244

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