Experimental study on the in-situ measurement for large optical flats

Xin Wu; Yingjie Yu

doi:10.1117/12.2502160

24 July 2018 Experimental study on the in-situ measurement for large optical flats

Xin Wu, Yingjie Yu

Proceedings Volume 10827, Sixth International Conference on Optical and Photonic Engineering (icOPEN 2018); 108270L (2018) https://doi.org/10.1117/12.2502160
Event: Sixth International Conference on Optical and Photonic Engineering (icOPEN 2018), 2018, Shanghai, China

Abstract

In-situ measurement is an ideal method to improve the precision and efficiency of manufacturing. This paper developed an in-situ subaperture stitching interferometric measuring system for large plano optics in the workshop environment. It can realize high precision and considerable repeatability. The principle of in-situ subaperture stitching measurement was introduced briefly. A validation test has been presented to verify that the in-situ measuring can be realized with the developed system.

Citation Download Citation

Xin Wu and Yingjie Yu "Experimental study on the in-situ measurement for large optical flats", Proc. SPIE 10827, Sixth International Conference on Optical and Photonic Engineering (icOPEN 2018), 108270L (24 July 2018); https://doi.org/10.1117/12.2502160

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