Ultra-precision robotic sub-aperture polishing of curved mirrors

Songlin Wan; Xiangchao Zhang; Min Xu; Siping Peng; Jinsong Zhou

doi:10.1117/12.2506361

6 February 2019 Ultra-precision robotic sub-aperture polishing of curved mirrors

Songlin Wan, Xiangchao Zhang, Min Xu, Siping Peng, Jinsong Zhou

Author Affiliations +

Proceedings Volume 10842, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Subdiffraction-limited Plasmonic Lithography and Innovative Manufacturing Technology; 1084214 (2019) https://doi.org/10.1117/12.2506361
Event: Ninth International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT2018), 2018, Chengdu, China

Abstract

Industrial robots have great potential for efficient and flexible polishing of large optical components, but the low positioning accuracy and control stability limits the polishing form quality. A model is established to describe the pressure distribution at the edge based on FEA analysis, and the effects of form deviation between the workpiece and the polishing pad is also investigated, thus TIFs can be calculated reliably. Polishing paths are planned to avoid sharp turning angles and fast movement, which can lead to unstable material removal. The dwell time is calculated via deconvolution with the space-variant TIFs. Experiments are conducted and the results show that the edge-roll error is significantly reduced and the polishing time is saved by 80%. Hence the robotic polisher can be comparable to the conventional polishing machines, which has a great significance for the ultra-precision optical manufacturing.

Citation Download Citation

Songlin Wan, Xiangchao Zhang, Min Xu, Siping Peng, and Jinsong Zhou "Ultra-precision robotic sub-aperture polishing of curved mirrors", Proc. SPIE 10842, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Subdiffraction-limited Plasmonic Lithography and Innovative Manufacturing Technology, 1084214 (6 February 2019); https://doi.org/10.1117/12.2506361

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