Stabilization mechanism of miniature extrinsic Fabry-Perot sensors based on micromachined diaphragm

Fuyin Wang; Shuidong Xiong; Hong Luo; Qiong Yao; Zhengzheng Shao

doi:10.1117/12.2504757

8 February 2019 Stabilization mechanism of miniature extrinsic Fabry-Perot sensors based on micromachined diaphragm

Fuyin Wang, Shuidong Xiong, Hong Luo, Qiong Yao, Zhengzheng Shao

Proceedings Volume 10843, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices for Sensing and Imaging; 1084302 (2019) https://doi.org/10.1117/12.2504757
Event: Ninth International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT2018), 2018, Chengdu, China

Abstract

The stability features of the miniature fiber optic extrinsic Fabry-Perot interferometric (EFPI) sensors are important to signal recovery. In this paper, we explore the stabilization mechanism of the micromachined diaphragmbased EFPI sensors by means of the workpoint drift. Three sensors with the same sensing units but different encapsulation structures were fabricated to achieve comprehensive demonstration. Experiments were carried out separately in air and in water within a wavelength-tunable workpoint feedback control (WPFC) configuration. Results show that these three different sensors present distinguished workpoint drift rates. The main disturbance which cause the workpoint drift comes from the thermal exchange of the sensing diaphragm with the surroundings. Whereas a fast drift rate could disable WPFC, a totally enclosed encapsulation structure could help to improve the stability of the EFPI sensors.

Citation Download Citation

Fuyin Wang, Shuidong Xiong, Hong Luo, Qiong Yao, and Zhengzheng Shao "Stabilization mechanism of miniature extrinsic Fabry-Perot sensors based on micromachined diaphragm", Proc. SPIE 10843, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices for Sensing and Imaging, 1084302 (8 February 2019); https://doi.org/10.1117/12.2504757

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