Highly sensitive terahertz-wave arrayed detector using InAs-HEMT on glass for video-imaging application

Hiromu Kojima; Daishi Kido; Haruichi Kanaya; Hiroyuki Ishii; Tatsuro Maeda; Eiji Kume; Mutsuo Ogura; Tanemasa Asano

doi:10.1117/12.2510794

1 March 2019 Highly sensitive terahertz-wave arrayed detector using InAs-HEMT on glass for video-imaging application

Hiromu Kojima, Daishi Kido, Haruichi Kanaya, Hiroyuki Ishii, Tatsuro Maeda, Eiji Kume, Mutsuo Ogura, Tanemasa Asano

Proceedings Volume 10917, Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XII; 109170Y (2019) https://doi.org/10.1117/12.2510794
Event: SPIE OPTO, 2019, San Francisco, California, United States

Abstract

This paper presents a newly developed square law detector array whose NEP is as low as ~ 1 pW/Hz^0:5 for 1.0 THz waves. The detector array using high electron mobility transistor (HEMT) with InGaAs/InAs/InGaAs double hetero-structured channel has been fabricated. The InAs-HEMT was fabricated on a quartz substrate using the layer transfer technology. Also, an array of square law detectors was developed by applying advanced selective etching, atomic layer deposition, and metallization to the transferred hetero-structured layers. The static analysis revealed that the transistor shows electron mobility as high as 3,200 cm²/Vs and low leakage with subthreshold slope as low as ~ 100 mV/dec. Detection performance was characterized by directly inputting 1.0 THz waves thorough a THz probe to each of the arrayed detectors. It is also demonstrated that the detection characteristics were well described by the analytical formulae derived from the channel-carrier behavior model. The experimental results suggested that the developed detector array is a promising candidate for imaging application.

Conference Presentation

Citation Download Citation

Hiromu Kojima, Daishi Kido, Haruichi Kanaya, Hiroyuki Ishii, Tatsuro Maeda, Eiji Kume, Mutsuo Ogura, and Tanemasa Asano "Highly sensitive terahertz-wave arrayed detector using InAs-HEMT on glass for video-imaging application", Proc. SPIE 10917, Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XII, 109170Y (1 March 2019); https://doi.org/10.1117/12.2510794

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