Study of Nb-based material combination multilayer for X-ray applications

Jiayi Zhang; Jingtao Zhu; Jinwen Chen; Bin Ji; Jie Zhu; Miao Li; Shengming Zhu; Mingqi Cui

doi:10.1117/12.2520851

26 April 2019 Study of Nb-based material combination multilayer for X-ray applications

Jiayi Zhang, Jingtao Zhu, Jinwen Chen, Bin Ji, Jie Zhu, Miao Li, Shengming Zhu, Mingqi Cui

Author Affiliations +

Proceedings Volume 11032, EUV and X-ray Optics: Synergy between Laboratory and Space VI; 1103209 (2019) https://doi.org/10.1117/12.2520851
Event: SPIE Optics + Optoelectronics, 2019, Prague, Czech Republic

Abstract

Nb-based Multilayer Laue Lens (MLL) shows high efficiency and great focusing ability at energy around 18keV theoretically. In this paper, to study the potential of Nb-based material combinations in nano-focusing, a series of Nbbased multilayers: Nb/Si, Nb/Al and Nb/Al(1%wtSi) are fabricated by using direct-current magnetron sputtering technology. Real-time stress measurement is utilized for stress analysis while the quality of multilayers is characterized by XRR and XRD. As a result, Nb presents a crystal state in the Nb/Si multilayer, and shows an asymmetric distribution at the interfaces. Both Nb films and Si films are in a strong compressive stress state, leading to a large total stress. Studies on the Nb/Al and Nb/Al(1%wtSi) multilayers show that both Al and Nb were crystalline under pure Ar sputtering conditions, resulting in large film interface width and poor film quality. The addition of 10% concentration of nitrogen in reactive sputtering can effectively suppress the crystallization of Al and change the crystalline state of Nb. However, the introduction of nitrogen greatly increased the compressive stress of Nb film, resulting in larger stress.

Conference Presentation

Citation Download Citation

Jiayi Zhang, Jingtao Zhu, Jinwen Chen, Bin Ji, Jie Zhu, Miao Li, Shengming Zhu, and Mingqi Cui "Study of Nb-based material combination multilayer for X-ray applications", Proc. SPIE 11032, EUV and X-ray Optics: Synergy between Laboratory and Space VI, 1103209 (26 April 2019); https://doi.org/10.1117/12.2520851

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